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2024年12月28日发(作者：吴文中在线数字随机生成器)

专利内容由知识产权出版社提供

专利名称：Consecutive processing system null of

semiconductor

发明人：KIRISAKO TADASHI,桐迫 正

申请号：JP特願平2-251046

申请日：19900920

公开号：JP第2934296号B2

公开日：19990816

摘要：PURPOSE:To increase the production efficiency while assuring the quality of the

product by a method wherein test pieces are processed on processing apparatuses

during the continuous processing of a plurality of semiconductor substrates and the

processed test pieces are evaluated for the specified items at regular intervals on each

processing apparatus. CONSTITUTION:A plurality of semiconductor substrates 100 are

transported one by one to processing apparatuses 18-31 to be processed on each

apparatus in sequence. In this continuous processing system of semiconductor

substrates, test pieces 200, 300, 400, 500, 600 and 700 are processed on the processing

apparatuses during the continuous processing of a plurality of semiconductor substrates.

And, the processed test pieces are evaluated for the specified items at regular intervals

on each processing apparatus. Since the semiconductor substrates are processed one by

one in this continuous processing system, the production time can be shortened

compared with the case in which the batch processing is employed. In addition, the driving

condition of each processing apparatus can be assured periodically during the production

process of semiconductor devices and the quality of treatments which are done to the

semiconductor substrates can be indirectly guaranteed since the test pieces are

processed and evaluated.

申请人：FUJITSU KK,富士通株式会社

地址：神奈川県川崎市中原区上小田中4丁目1番1号

国籍：JP

代理人：伊東 忠彦 (外2名)

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