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2024年12月29日发(作者：log4j漏洞怎么用)
专利内容由知识产权出版社提供
专利名称：PLASMA BOAT
发明人：MÖLLER, Rainer,WANDEL, Gernot,REICHART,
Hans
申请号：DE2001003388
申请日：20010829
公开号：WO02/020871P1
公开日：20020314
摘要：The invention relates to a plasma boat for supporting plate-like substrates (3)
and for treating the same in a processing device such as a plasma CVD system (PECVD) or
similar, comprising a number of parallel supporting plates (2). Said supporting plates (2)
are alternately connected to the outputs of a high frequency generator (HF generator) in
such a manner that they are insulated in relation to each other. The aim of the invention is
to create a plasma boat that enables automatic fitting and which especially guarantees
uniform coating of the substrates (3) as far as the edge area. The substrates (3)
supported by the inventive plasma boat are three-dimensionally fixed on the supporting
plates (2) by the force of gravity, lying in an essentially horizontal position. To this end,
supporting devices (6) in which a three-point bearing with bearing pins (1) for electrical
contacting is located are provided.
申请人：MÖLLER, Rainer,WANDEL, Gernot,REICHART, Hans
地址：Johannes-Schmid-Strasse 3 89143 Blaubeuren DE,Stephanstrasse 55 01129
Dresden DE,Mondweg 6 80143 Blaubeuren DE,Hessenhöfe 46 89134 Blaubeuren DE
国籍：DE,DE,DE,DE
代理机构：LIPPERT, STACHOW, SCHMIDT & PARTNER
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