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2024年12月28日发(作者:android studio最新版安装教程)
专利内容由知识产权出版社提供
专利名称:FLASH MEMORY WITH TREATED CHARGE
TRAP LAYER
发明人:Mihaela Balseanu,Vladimir Zubkov,Li-Qun
Xia,Atif Noori,Reza Arghavani,Derek R.
Witty,Amir Al-Bayati
申请号:US12256173
申请日:20081022
公开号:US2A1
公开日:20100422
专利附图:
摘要:A methods of forming a flash memory device are provided. The flash memory
device comprises a silicon dioxide layer on a substrate and a silicon nitride layer that is
formed on the silicon dioxide layer. The properties of the silicon nitride layer can be
modified by any of: exposing the silicon nitride layer to ultraviolet radiation, exposing the
silicon nitride layer to an electron beam, and by plasma treating the silicon nitride layer. A
dielectric material is deposited on the silicon nitride layer and a conductive date is
formed over the dielectric material. The flash memory device with modified silicon nitride
layer provides an increase in charge holding capacity and charge retention time of the
unit cell of a non-volatile memory device.
申请人:Mihaela Balseanu,Vladimir Zubkov,Li-Qun Xia,Atif Noori,Reza Arghavani,Derek
R. Witty,Amir Al-Bayati
地址:Sunnyvale CA US,Mountain View CA US,Cupertino CA US,Saratoga CA US,Scotts
Valley CA US,Fremont CA US,San Jose CA US
国籍:US,US,US,US,US,US,US
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