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2024年12月29日发(作者：access是数据库系统对不对)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE TRANSFER SYSTEM AND

ATMOSPHERIC TRANSFER MODULE

发明人：Norihiko AMIKURA,Toshiaki TOYOMAKI

申请号：US17542249

申请日：20211203

公开号：US2A1

公开日：20220324

专利附图：

摘要：A substrate transfer system includes a load lock module, an atmospheric

transfer module having a first sidewall adjacent to the load lock module and a second

sidewall remote from the load lock module, the atmospheric transfer module being

connected to the load lock module, and a substrate transfer robot disposed in the

atmospheric transfer module. The substrate transfer robot includes a base configured to

reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a

flow rectifier surrounding the base, the flow rectifier being configured, upon movement

of the base, to create an obliquely downward air flow in a direction opposite to a moving

direction of the base.

申请人：TOKYO ELECTRON LIMITED

地址：Tokyo JP

国籍：JP

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