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2024年12月28日发(作者：textarea什么意思html)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE PROCESSING SYSTEM

发明人：MATSUBAYASHI, Shinji,KAWAKAMI,

Satoru,TOBE, Yasuhiro,NISHIMURA,

Masaru,YAGI, Yasushi,HAYASHI,

Teruyuki,ONO, Yuji,SHIMO, Fumio

申请号：JP2009069196

申请日：20091111

公开号：WO10/055851P1

公开日：20100520

摘要：To provide a substrate processing system which can increase an interval

between various processing devices connected to the side surface of a transfer module,

exhibit an excellent maintenance property, avoid deterioration of the throughput, and

assure a sufficient productivity. Provided is a substrate processing system for

manufacturing an organic EL element by layering on a substrate, a plurality of layers

including, for example, an organic layer. A rectilinear carry path is configured by one or

more transfer modules to be subjected to evacuation. Inside the transfer modules are

arranged a plurality of carry in/out areas for carrying the substrate into/out of the

processing devices and one or more stock areas arranged therebetween. The carry

in/out areas and the stock areas are alternately arranged in series along the carry path.

The processing devices are connected, at the positions opposing to the carry in/out

areas, to the side surface of the transfer module.

申请人：MATSUBAYASHI, Shinji,KAWAKAMI, Satoru,TOBE, Yasuhiro,NISHIMURA,

Masaru,YAGI, Yasushi,HAYASHI, Teruyuki,ONO, Yuji,SHIMO, Fumio

地址：JP,JP,JP,JP,JP,JP,JP,JP,JP

国籍：JP,JP,JP,JP,JP,JP,JP,JP,JP

代理人：HAGIWARA, Yasushi

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