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2024年12月28日发(作者:二维数组范围)
专利内容由知识产权出版社提供
专利名称:SUBSTRATE CASSETTE WITH SUBSTRATE
SLIPPING-DOWN PREVENTING MECHANISM
发明人:SAITO KUNIHARU,YOSHIDA TOSHIO
申请号:JP30129190
申请日:19901106
公开号:JPH04171965A
公开日:19920619
摘要:PURPOSE:To surely prevent substrates from slipping down by making the
vertical shaft of a substrate locking means rotatable along a steeply inclined spiral
groove at the same time when the shaft is moved in the vertical direction and making the
locking vane of the substrate locking means rotate a substrate entrance/exit in the
opening direction when a cassette is placed on a cassette placing surface and in the
closing direction by its own weight when the cassette is lifted up from the surface.
CONSTITUTION:A substrate locking means 3 is composed of a vertical shaft 31 and
locking vane 32. The upper and lower ends of the shaft 31 are pivotally supported with a
ceiling-side and bottom-side frames 12 and 11, respectively. The shaft 31 protrudes
downward from the frame 11 and can be rotated at the same time when the shaft 31 is
moved in the vertical direction by means of a steeply inclined spiral groove 4 and pin 5
provided in corresponding to the frames 11 and 12. When a cassette is placed on a
cassette placing surface, a locking vane 32 rotates a substrate entrance/ exit 1a in the
opening direction, since the lower end of the shaft 31 is pushed up and rotated. When the
cassette is lifted up from the surface, the vane 32 rotates the entrance/exit 1a in the
closing direction since the shaft 31 rotationally descends by its own weight.
申请人:YODOGAWA KASEI KK
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