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2024年12月27日发(作者：kerastase卡诗银安瓶)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE TRANSFER DEVICE

发明人：OTANI MASAMI,NISHIDA MASAMI,HIMOTO

MASAHIRO

申请号：JP4622887

申请日：19870227

公开号：JPS63213355A

公开日：19880906

摘要：PURPOSE:To prevent disadvantages such as generation of scars and sticking of

dust on a rear surface of a substrate, by transferring the substrate by means of a

substrate transfer tool which moves horizontally and moves up and down vertically so

that the rear surface of the substrate is not slided in contact with a substrate holding

tool. CONSTITUTION:A supplying part up-and-down means 11 is moved down to mount

an untreated plate, which is mounted on a substrate supplying part 2, on an untreated

substrate mounting division 24a of a substrate transfer tool 4. In succession, a substrate

transfer tool 4 is moved horizontally to a substrate holding tool 1 in a substrate

processing part and then moved upward, so that the treated substrate mounted on the

substrate holding tool 1 is mounted on a treated substrate mounting division 24b in the

substrate transfer tool 4. After the treated substrate is moved horizontally to a

substrate discharge part 3, an exhaustion part up-and-down means 15 is moved upward

to mount the treated substrate on the substrate discharge part 3. Further then, after the

untreated substrate is moved horizontally to the substrate holding tool 1, it is moved

downward to be mounted on the substrate holding tool 1. A series of operations allow

the untreated substrate and the treated substrate to be mounted at a time. Hence,

disadvantages such as generation of minute scars and sticking of dust on a rear surface of

the substrate can be prevented.

申请人：DAINIPPON SCREEN MFG CO LTD

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