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2024年12月27日发(作者：linux系统下载浏览器)

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专利名称：Substrate table

发明人：早津 夏樹

申请号：JP2018220541

申请日：20181126

公开号：JP2020088171A

公开日：20200604

专利附图：

摘要：PROBLEM TO BE SOLVED: To provide a substrate mounting table capable of

suppressing damages such as scratches generated when a substrate is mounted and

capable of handling substrates of a plurality of sizes. A substrate mounting table is a

substrate mounting table on which a substrate is mounted, and is provided on a bottom

portion that is larger than the outer diameter of the substrate in plan view and on an

upper side of the bottom portion to support an outer peripheral portion of the

substrate. And three or more support portions, each of which is radially disposed with

respect to a vertical axis passing through a central portion of the bottom portion in plan

view and is inclined downward in the direction of the axis. The inclined portion supports

the outer peripheral portion of the substrate. [Selection diagram] Figure 1

申请人：住友金属鉱山株式会社

地址：東京都港区新橋５丁目１１番３号

国籍：JP

代理人：西 和哉,宇佐美 亜矢

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