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2024年12月27日发(作者：免root框架大全下载)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE REPLACING METHOD

发明人：ADACHI HIDEKI,足立 秀喜

申请号：JP特願平7-129426

申请日：19950427

公开号：JP特開平8-306761A

公开日：19961122

专利附图：

摘要：PURPOSE: To provide a method for replacing a substrate in which the time

required for replacing a substrate with respect to the substrate mounting table at a

processing section can be shortened. CONSTITUTION: A processed substrate on a

substrate mounting table Tb is replaced by an unprocessed substrate by means of first

and second substrate transfer hands 15U, 15L. In this process, the first substrate transfer

hand 15U is advanced below the substrate mounting table Tb (Step S1) and then the first

substrate transfer hand 15U is moved upward in order to receive a processed substrate

Wb from the substrate mounting table Tb, while substantially at the same time, the

second substrate transfer hand 15L mounting an unprocessed substrate is moved above

the substrate mounting table Tb (Step S2). Subsequently, the first substrate transfer

hand 15U is retreated from the processing section, while substantially at the same time,

the second substrate transfer hand 15L is advanced above the substrate mounting table

Tb (Step S3). Finally, the second substrate transfer hand 15L is lowered (Step S4) and the

second substrate transfer hand 15L is retreated from the processing section (Step S5).

申请人：DAINIPPON SCREEN MFG CO LTD,大日本スクリーン製造株式会社

地址：京都府京都市上京区堀川通寺之内上る4丁目天神北町1番地の1

国籍：JP

代理人：五十嵐 孝雄 (外1名)

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