admin 管理员组

文章数量: 1087135


2024年12月28日发(作者：c语言客户端服务器)

专利内容由知识产权出版社提供

专利名称：Substrate coated with an MgO layer

发明人：Johannes Stollenwerk,Christoph

Daube,Achim Gürke

申请号：US09687845

申请日：20001013

公开号：US06676814B1

公开日：20040113

专利附图：

摘要：A method for manufacturing a display panel substrate has the steps of flowing

a working gas along and out of a slit defined between two sputtering targets of Mg and

toward the substrate thereby selecting the purity of the Mg material of the targets to

be at least 99% and thereby blowing sputtered-off material out of the slit and toward

the substrate. Introduction, in an area between the slit and the substrate, of a reactive

gas containing oxygen, follows, and reacting the sputtered-off material with the reactive

gas results in depositing on the substrate, an MgO layer. The method also includes

setting the temperature of the substrate during the coating process.

申请人：UNAXIS TRADING AG

代理机构：Notaro & Michalos P.C.

更多信息请下载全文后查看


本文标签： 专利 知识产权 出版社 内容 语言

版权声明：本文标题：Substrate coated with an MgO layer 内容由网友自发贡献，该文观点仅代表作者本人， 转载请联系作者并注明出处：http://roclinux.cn/p/1735457571a1666967.html， 本站仅提供信息存储空间服务，不拥有所有权，不承担相关法律责任。如发现本站有涉嫌抄袭侵权/违法违规的内容，一经查实，本站将立刻删除。