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2024年12月28日发(作者：c语言客户端服务器)

专利内容由知识产权出版社提供

专利名称：Substrate coated with an MgO layer

发明人：Johannes Stollenwerk,Christoph

Daube,Achim Gürke

申请号：US09687845

申请日：20001013

公开号：US06676814B1

公开日：20040113

专利附图：

摘要：A method for manufacturing a display panel substrate has the steps of flowing

a working gas along and out of a slit defined between two sputtering targets of Mg and

toward the substrate thereby selecting the purity of the Mg material of the targets to

be at least 99% and thereby blowing sputtered-off material out of the slit and toward

the substrate. Introduction, in an area between the slit and the substrate, of a reactive

gas containing oxygen, follows, and reacting the sputtered-off material with the reactive

gas results in depositing on the substrate, an MgO layer. The method also includes

setting the temperature of the substrate during the coating process.

申请人：UNAXIS TRADING AG

代理机构：Notaro & Michalos P.C.

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