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2024年12月28日发(作者：源代码 电影 英文)

专利内容由知识产权出版社提供

专利名称：ALIGNER

发明人：IMAI YUJI,今井 裕二

申请号：JP特願平3-311743

申请日：19911029

公开号：JP特開平5-121296A

公开日：19930518

专利附图：

摘要：PURPOSE:To prevent lowering of the precision in alignment due to positional

shift of irradiation of an alignment beam by correcting a positional change of irradiation

of an alignment light for detection of an alignment mark on a light-sensitive substrate on

the occasion when an optical element of a projecting optical system is driven.

CONSTITUTION:Based on the information on a wafer mark position from an alignment

signal processing circuit 110, a main control device 120 delivers to a controller 19 such a

prescribed driving instruction as to make optimal the position of a wafer W, and controls

a motor 202 through the intermediary of the controller 19. By controlling movement of a

wafer stage 12, it executes a control for positioning the wafer W at an aimed position. In

equipment 50 for alignment in this constitution, the optical path of an alignment beam SP

is corrected by halvings 102A and 102B for position correction and halvings 104A and

104B for tilt correction. Thereby the position of the alignment beam can always be

controlled constant.

申请人：NIKON CORP,株式会社ニコン

地址：東京都千代田区丸の内3丁目2番3号

国籍：JP

代理人：田辺 恵基

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