Headway Spin Coater说明书

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Find the Headway Research PWM32-PS-CB15 at our website:

Click HERE

Headway Spin Coater Instruction Manual

Roger Robbins 6/21/2007

The University of Texas at Dallas

Erik Jonsson School of Engineering

DOCUMENT TITLE:

Headway Spin Coater Instruction Manual

AUTHOR:

Roger Robbins

DOCUMENT NUMBER:

SP2007-LI-001

Page 1 of

7

6/21/2007

Headway Spin Coater Instruction Manual

Roger Robbins 6/21/2007

Table of Contents

Headway Spin Coater 2

Table 2

3

3

Sign .4

4

Programming 5

5

6

7

.7

DOCUMENT TITLE:

Headway Spin Coater Instruction Manual

AUTHOR:

Roger Robbins

DOCUMENT NUMBER:

SP2007-LI-001

Page 2 of

7

6/21/2007

Headway Spin Coater Instruction Manual

Roger Robbins 6/21/2007

Introduction

The Headway Spinner enclosed in a stainless steel solvent hood was donated by

TI to the UTD Clean Room. This manual spinner has a new controller, the Headway

model PWM32, which allows a bit of programming similar to our new CEE spinner. We

can use the Headway for small samples because it has facilities more amenable to tiny

samples. It will be mandatory to clean this bowl after your job is complete. This

paper describes how to program and use the system.

Description

The spinner system consists of a stainless steel solvent hood, a spin chuck on a

motor shaft in the base of the hood deck, a motor controller sitting on top of the hood

(out of solvent fumes), and a foot switch to start the spin cycle for coating. This system

is labeled in Figure 1.

Headway Spinner Controller

Spin Bowl

Air Gun

Foot Switchshowing red and green circles

Figure 1. Headway Spinner enclosed in a SS Solvent Hood.

DOCUMENT TITLE:

Headway Spin Coater Instruction Manual

AUTHOR:

Roger Robbins

DOCUMENT NUMBER:

SP2007-LI-001

Page 3 of

7

6/21/2007

The spinner can accommodate sample sizes from about 1 to 8 inches. Anything

smaller than an inch must use a spin chuck with Kapton tape covering the vacuum rings

and one hole punched in the center of the Kapton to vacuum clamp the sample. This

will prevent resist from sucking down the vacuum port in the chuck and gumming up the

works. The spin motor can be programmed to ramp up and down for resist spreading

and safe stopping. If there is an excess of solvent or resist, there are two holes in the

bottom of the bowl that drain into two solvent containers below the deck. Unlike a toilet,

the lid over the spin bowl is interlocked to prevent spinning with the lid up. Figure 2

shows the spin bowl with a photomask mounted on a spin chuck.

Spin Bowl

Resist/Solvent Drain holes

Spin Bowl Lid

Spin Bowl Lid Latch (Interlocked)

Figure 2. Spin Bowl with photomask on spin chuck.

The spin chucks are attached to the motor shaft via a D-shaped shaft and D-

shaped hole in the bottom of the chuck socket with a small o-ring in it to seal the vacuum

in. Note that the chuck surface must be completely clean before attempting to vacuum

clamp a sample for spinning. This is extremely important to prevent samples from flying

off at potentially high speeds and possibly causing injury. This spin motor can

accelerate at 20,000 rpm/sec which can impart a rather high force to the wafer.

Sign the Logbook

When you approach the spinner for a job, the first thing that you do is sign the

logbook. Violators of this policy will be prosecuted to the fullest extent of the law.

Substrate Centering

This is a manual spinner requiring manual centering of substrates. If the

substrate is off-center too much, it will exert a centrifugal force on the vacuum chuck and

attempt to fly off on its own. We will include a program named “0” that will spin the

chuck at about 200 rpm for maybe 5 seconds as a test of centering. If the substrate

wobbles more than ¼ inch, recenter the substrate and test it again. Repeat until the

substrate spins at center. Do not change program #0; user programs will start at #1.

DOCUMENT TITLE:

Headway Spin Coater Instruction Manual

AUTHOR:

Roger Robbins

DOCUMENT NUMBER:

SP2007-LI-001

Page 4 of

7

6/21/2007

Programming the Controller

General

The Headway Model PWM32 controller is programmed via the membrane keys

on the face of the controller, Figure 3. A recipe (identified by a number 0-9) consists of a

sequence of steps. Steps inside a recipe are also identified with a number (0-9). This

means that there are 10 possible programs with a maximum of 10 steps in each. Once

a program step has been entered, it cannot be erased. If you need to erase an

individual step, then you have to erase the entire program and start over. Any step

underway can be immediately terminated by stepping on the red circle of the foot switch.

Note also that the timer does not start until the spin chuck has ramped to its stable

assigned speed. Also during development of a program, the programmer can

temporarily alter the speed of the chuck by pressing the membrane keys across from the

up and down speed arrows in the lower right of the keypad. In general, a program step

must be terminated by something, usually time, but could be set to some other event,

such as spinning chuck reaching zero velocity, or manual termination, etc.

In the LCD display you can see the status of the controller: Current recipe

number in the format of (current step - of – total steps), time, State (Ready, Review,

Running, and Programming, Abort), vacuum mode (AU – Auto, MN – Manual), and a

strange code in the last line.

LCD Display

Keypad

Off/On Switch

Figure 3. Headway Model PWM32 Controller

DOCUMENT TITLE:

Headway Spin Coater Instruction Manual

AUTHOR:

Roger Robbins

DOCUMENT NUMBER:

SP2007-LI-001

Page 5 of

7

6/21/2007

Programming Details

Programming is rather simple and consists of setting a program number, adding

steps and setting the step terminator. It is a good idea to write down your program

before “winging” it on the controller keyboard since you cannot erase a step.

Simple programs consist of parameters like speed (rpm), ramp acceleration

(rpm/sec), spin time (sec), and ramp deceleration (rpm/sec). You may have several

steps such as a resist spreading spin, a full speed spin to dry the resist, and a

deceleration-to-zero step for program termination. The following example of

programming will include three steps – use your own values instead of the ones I have

listed in the example.

• Enter the program number:

o Press “Recipe”

o Press a number key to label the program

o If you want to erase a program, press “Recipe”, then “Clear” and then the

Recipe number.

• Select Step 1:

o Press “Step”

o Press a number key to indicate the step you are programming - 1

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