操作主界面英语2

操作主界面英语

英文

MAIN MENU

OPERATE

MANUAL

AUTO

SETTING

RECIPE

SYSTEM

DATA

HISTORY

EXP. STATUS

MANUAL MODE

曝光机主要缩写词

英文缩写

EXP

ADD

POS.

SCO.

CONV

I/F

LOC

PRE

PROC

ERR.

CYC

STA

COMP

ID

DISCH.

REF.

LIB.

CHG

DISP

全文

EXPOSURE

ADDRESS

POSITIONING

SCOPE

CONVEYOR

INFORMATION

LOCATION

PRESENT

PROCESSED

ERROR

CYCLE

STATUS

COMPLETE

DISCHARGE

REFERENCE

Library

CHANGE

DISPLAY

译文

曝光

地址，坐标

定位

显微镜

传输带

信息

位置，就位

当前，现在

已加理的片数

错误，出错

周期，循环

状态

结束，完成

身份，识别

排出，输出

参考，基准

库，图书馆

更换，更改

显示

功能

PROC, SHEETS

译文

主菜单

操作

手动操作

自动操作

设置

程序

系统设置

数据

历史

曝光状态

手动模式

功能

备注

手动操作主界面(CONV.界面)

英文

Y

MONITOR

SUPPLY

CONVEYOR

译文 功能 备注

详细地址，详细坐标

监视器

供给传送辊

1

SUPPLY

ALIGNMENT

供给处对位

SUPPLY ALIGN. 供给对位的原始位置

ORIGIN

SUPPLY ALIGN. 供给对们设置的位置

SET. POS.

POS1

ORIGIN

SENSOR 定位感应器的原始位

置

POS1 SETTING 定位感应器的经设定

POSITION 的位置

SUPPLY IONIZER

SHUTTLE UP

SHUTTLE

FORWARD

SHUTTLE

BACKWARD

DISCHARGE

CONVEYOR

DISCHARGE

ALIGNMENT

排出处的传送辊

排出对位

供给处的离子除尘器

SHUTTLE DOWN

DISCH. ALIGN.

ORIGIN

DISCH. ALIGN.

SET. POS.

DISCHARGE

IONIZER

CONV.

STAGE

SCO./GAP

MASK

ADD. SPECIFY 界面

英文

SCOPE (F) X

SCOPE (F) Y

SCOPE(R) X

SCOPE(R) Y

译文

前端显微镜的X轴方

向位置

前端显微镜的Y轴方

向位置

后端显微镜的X轴方

向位置

后端显微镜的Y轴方

排出基板出的离子除

尘器

传送辊

基板台

母板

显示对传送辊的手动

操作界面

显微镜与间隙感应器

功能

备注

2

向位置

LOC. POINTS

PRE. POINTS

POS.

将要移动到的位置

当前位置

定位

按此按扭，可对位置

的输入进行设置

Set locaton point of scope.(mm unit)

Origin point (o) is center of mask holder

MONITOR 主界面

AUTO OPERATION主界面

英文

MONITOR

LOADING

PRE. ALIGNMENT

GAP SETTING

ALIGNMENT

EXPOSURE

DISCHARGE

UNLOADING

PROCESS DATA

SLOT NO.

RECIPE NO.

MASK ID

SUB. SIZE

EXPOSURE

COMMENT

STATUS

MASK SET COMP.

START

CYC. STOP

RUN. STA.

SUB. STA

MASK LIBRARY

SETTING DATA

MONITOR

WARNING

NORMAL

译文

监视器

装载

预对位

间隙设置

对位

曝光

排出，输出

卸载

过程数据

MASK库里的狭槽编

号

程序号

MASK编号

基板尺寸

曝光

指令

状况，状态

MASK设置完成

开始

完成一周期后停止

运行状况

基板状况

MASK库

所设置的数参

监视器

警报

正常

功能

备注

3

READY

SENSOR

I/F

SUP. CONVEYOR

PROC. SHEETS

准备就绪

感应器

信息

供给传送辊

已加工的片数

Auto operation 下的mask library的界面

英文

SLOT

ID

AVAIL

USING

SELECT

DELETE

SUPPLY

DISCH.

CHANGE

译文

编号，身份，识别

可用状况

正在使用

选择

删除

供给

排出，输出

更换

功能

备注

CURRENT RECIPE 当前程序号

NO.

CURRENT MASK 当前MASK 编号

ID

CRRENT

NO.

LOADING

CANCEL

VALUE CHANG

SLOT

装载

取消

参数值的更改

ABOVE 如上，先前，

上方

DISP, CHANGE

ID. CHG.

BACK

Registration

Editing

DIRECT

显示改变的项

ID切换

返回

注册确认

编辑

直接输入NO. 无需PAGE UP OR

PAGE DOWN

，AUTO OPERATION 主界面下的，SETTINT DATA 界面的第一页

英文 译文 功能

备注

4

SUBSTRATE SIZE 基板尺寸

SUBSTRATE

THICK

EXPOSURE

QUANTITY

基板厚度

曝光量

RUN WITHOUT

MASK

GAP SENSOR

POS. NO.

GAP TABLE

GAP POS.

CORRECTION

PROXIMITY UP

ALIGNMENT

CHECK

ALIGN.

RETRY

RECIPE

SYSTEM

PAGE

第二页

英文

JOB

IN LINE

译文

工作方式

联机

对位检测

CHK

程序

系统

页面

显示已设的近似曝光

的上调了的高度

不可修改的界面

功能

备注

THROUGN

EXPOSURE

OFF-LINE

-LINE

IN

GAP MEASURE 间隙测量模式

MODE

REE ALIGN.

MEAS. MODE

VACUUM

SOURCE CHECK

真空源检查

:CONTINUE ONE

TIME

RENEWABLE

CDA SOURGE 清洁干燥气体检查

CHECK

HIGH--PRESS

CHECK

高压检查

PRE ALIGNMENT 预对位重试次数

RETRY

5

MASK

ALIGNMENT

RETRY

GAP

RETRY

MASK对位重试次数

SETTING 间隙调整次数

自动对位重试次数

GAP NG RETRY

AUTO

ALIGNMENT

RETRY

MASK

CHECK

SUB. SUC. CHECK 基板吸真空检查

SUC. MASK吸真空检查

RECIPE EDIT 界面

此处多项与SETTING DATA 处的各项相同，只是在这里可以对各参数进行编辑，SETTING

DATA 处只可查看。

SAVING

COPY

PASTE

DELETE

保存

复制

粘贴

删除

：REAR

MASK PIN POS. MASK 顶针定位序

NO. 号

MASK

POS. NO.

MASK

POS. NO.

SCOPE

FOCUS

PRE ALIGNMENT

TABLE

EXPOSURE

NO.

EDGE

REF.

POS.

SENSOR

AUTO

ALIGNMENT

SUB. SCOPE POS.

NO.

AUTO ALIGNMENT

TABLE

SUB. FOCUS POS.

NO.

AUTO ALIGN. POS.

CORR.

SCOPE

REFLECTIVE OR

6

ILLUMINATIN:

TRANS. ILL. R

Q"TY

TRANS. ILL. F

Q"TY

SHIFT X

SHIFT Y

EXPOSURE

QUANTITY

SUB.

TIM E

SUB.

TIME

TRANSMISSION

二次曝光时用于调X

轴位置的，禁用

二次曝光时用于调

Y 轴位置的，禁用

二次曝光使用，禁

用

COOLING

SHRINK,

SYSTEM SETTING界面：

此处多项与SETTING DATA 处的各项相同，只是在这里可以对各参数进行编辑，SETTING

DATA 处只可查看。

英文

JOB

IN LINE

译文

功能

备注

THROUGN

EXPOSURE

OFF-LINE

-LINE

IN

GAP MEASURE

MODE

REE ALIGN.

MEAS. MODE

VACUUM

SOURCE CHECK

:CONTINUE ONE

TIME

RENEWABLE

CAD SOURGE

CHECK

HIGH--PRESS

CHECK

MASK

ALIGNMENT

RETRY

PRE ALIGNMENT

RETRY

7

GAP

RETRY

SETTING

GAP NG RETRY

AUTO

ALIGNMENT

RETRY

MASK

CHECK

MASK

PAUSE

PRE

PAUSE

GAP

PAUSE

AUTO

PAUSE

UV

CHECK

SHILL.

CHECK

SPOT

CHECK

MASK

CHECK

STAGE

CHECK

DISCH.

TIME

CONTROL

PASSWORD

TEST

PASSWORD

SUB. SUC. CHECK

SUC.

ALIGN.

ALIGN.

SETTING

ALIGN.

LAMP

UNIT

A/C

TEMP.

TEMP.

TACT

PROC. CHEETS

RESET

ERR. HISTORY界面

英文

DATE

CONTENTS

CODE

译文

功能

备注

8

RESET

TIME

Main axis origin check error

Shuttle fore motion error

Shuttle origin return error

Main axis origin check error

Main axis limit error

Chuttle up error

常见报警清单：

Chiller unit error: circulator emitting alarm or flow late of cooling water out of setting

range

Vacuum source pressure error: vacuum source pressure sensor is OFF

NO.

102

MESSAGE

Emergency stop

DETAILS

Pressing emergency stop

switch caused system to

urgently stop

Battery voltage for CPU of

PLC low.

Check conection of lead

connector for battery. If no

error found to

connection,promptly replace

battery

Data link between remote I/O

unit failed. Check whether

transmission cable broken or

short if switch

setting for staion No. And

xmsn speed correct.

Cycle no completed within

specified time. Interlock may

have worded not to operate

mechanicak system. Reset

error to restart.

Under inline,BUSY&STOP

from downstream macine were

OFF,or under

from

downstream machine turned

ON.

In operation, fence close

9

103 PLC battery low

104 Data link error

105 Cycle time over

109` Line defictive

111

Fence door close error

turned OFF.

113

114

115

Mask holder tempreature error

Stage temperature error

Chiller unit error

Mask holder temperature out

of setting range

Stage temperature out of

setting range

Circulator emitting alarm of

Flow late of cooling water out

of setting range

Thermal chamber not in steady

operation or emitting alarm

Set-up recipe is not registered

116

119

120

121

201

Thermal chamber error

Recipe not available error

Mask

error

library unregistered Set-up recipe is not registered

to mask library

Vacuum source pressure

sensor is OFF

Vacuum source pressure error

Supply conveyor preparatory Preparatory transfer of

transfer error supply conveyor failed to

transfer substrate from

entrance to POS.1.

Extraction eror in supply unit When extraction is operated in

supply unit, substrate is left on

supply conveyor

202

203 Extraction error in upstream When extraction is operated in

machine upstream machine, substrate is

left on supply conveyor

Link error in supply unit

Substrate remained error

Link eror occurred in upstream

machine or exposure system

Detected substrate on supply

conveyor, although GLASS ID

is subtracted from upstream

machine

204

205

211 Supply conveyor fore transfer When fore transfer of supply

error conveyor is ON,POS.1

substrate sensor not turned ON

within given time

Supply conveyor back transfer When back transfer of supply

error conveyor is

ON,POS.1substrate sensor not

turned OFF within given time

Supply conveyor low-speed When low-speed transfer of

transfer error wupply conveyor is ON,

POS.1substrate stop sensor not

turned ON within given time

Supplied substrate alignment When solenoid valve for

10

212

213

215

reference SET error supply substrate alignment is

ON, SET sensor not turned

OFF within given time

216 Supplied substrate alignment When solenoid valve for

reference RESET error supply substrate alignment is

OFF, RESET sensor not turned

OFF within given time.

11